| The multipole resonance probe: A concept for simultaneous determination of plasma density, electron temperature, and collision rate in low-pressure plasmas M Lapke, T Mussenbrock, RP Brinkmann Applied Physics Letters 93 (5), 2008 | 106 | 2008 |
| The multipole resonance probe: characterization of a prototype M Lapke, J Oberrath, C Schulz, R Storch, T Styrnoll, C Zietz, P Awakowicz, ... Plasma Sources Science and Technology 20 (4), 042001, 2011 | 86 | 2011 |
| Modeling and simulation of the plasma absorption probe M Lapke, T Mussenbrock, RP Brinkmann, C Scharwitz, M Böke, J Winter Applied physics letters 90 (12), 2007 | 64 | 2007 |
| Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings T Styrnoll, J Harhausen, M Lapke, R Storch, RP Brinkmann, R Foest, ... Plasma Sources Science and Technology 22 (4), 045008, 2013 | 39 | 2013 |
| Active plasma resonance spectroscopy: a functional analytic description M Lapke, J Oberrath, T Mussenbrock, RP Brinkmann Plasma Sources Science and Technology 22 (2), 025005, 2013 | 35 | 2013 |
| Study on electrostatic and electromagnetic probes operated in ceramic and metallic depositing plasmas T Styrnoll, S Bienholz, M Lapke, P Awakowicz Plasma Sources Science and Technology 23 (2), 025013, 2014 | 22 | 2014 |
| Practical implementation of a two-hemisphere plasma absorption probe C Scharwitz, M Böke, J Winter, M Lapke, T Mussenbrock, RP Brinkmann Applied Physics Letters 94 (1), 2009 | 21 | 2009 |
| Plasma etching and stealth dicing laser process G Albermann, S Moeller, T Rohleder, M Lapke, H Buenning US Patent 9,601,437, 2017 | 20 | 2017 |
| Plasma dicing with blade saw patterned underside mask T Rohleder, H Buenning, G Albermann, S Moeller, M Lapke US Patent 9,847,258, 2017 | 17 | 2017 |
| High die strength semiconductor wafer processing method and system H Buenning, S Moeller, M Lapke, G Albermann, T Rohleder US Patent 8,809,166, 2014 | 14 | 2014 |
| The multipole resonance probe: Investigation of an active plasma resonance probe using 3D-electromagnetic field simulations C Schulz, I Rolfes, T Styrnoll, P Awakowicz, M Lapke, J Oberrath, ... 2012 42nd European Microwave Conference, 566-569, 2012 | 14 | 2012 |
| The multipole resonance probe: Realization of an optimized radio-frequency plasma probe based on active plasma resonance spectroscopy C Schulz, M Lapke, J Oberrath, R Storch, T Styrmoll, C Zietz, P Awakowicz, ... IEEE Middle East Conference on Antennas and Propagation (MECAP 2010), 1-5, 2010 | 14 | 2010 |
| Wafer separation S Moeller, M Lapke US Patent App. 13/687,110, 2014 | 10 | 2014 |
| A novel radio-frequency plasma probe for monitoring systems in dielectric deposition processes C Schulz, T Styrnoll, M Lapke, J Oberrath, R Storch, P Awakowicz, ... 2012 International Conference on Electromagnetics in Advanced Applications …, 2012 | 10 | 2012 |
| Usage of electromagnetic modeling of the multipole resonance probe M Lapke, C Schulz, J Oberrath, R Storch, T Styrnoll, P Awakowicz, ... 2011 International Conference on Phenomena in Ionized Gases, 2011 | 9 | 2011 |
| Physics of the Advanced Plasma Source: a review of recent experimental and modeling approaches RP Brinkmann, J Harhausen, B Schröder, M Lapke, R Storch, T Styrnoll, ... Plasma Physics and Controlled Fusion 58 (1), 014033, 2015 | 6 | 2015 |
| A functional analytic description of active plasma resonance spectroscopy in terms of kinetic theory J Oberrath, M Lapke, T Mussenbrock, RP Brinkmann Proceedings of the 30th International Conference on Phenomena in Ionized …, 2011 | 6 | 2011 |
| Analyse und Optimierung der Multipolresonanzsonde als industrietaugliches Plasmadiagnostiksystem M Lapke Logos Verlag Berlin GmbH, 2011 | 6 | 2011 |
| Modelling of volume-and surface wave based plasma resonance spectroscopy M Lapke, T Mussenbrock, RP Brinkmann 2010 Abstracts IEEE International Conference on Plasma Science, 1-1, 2010 | 6 | 2010 |
| Combination grinding after laser (GAL) and laser on-off function to increase die strength H Buenning, S Moeller, G Albermann, M Lapke, T Rohleder US Patent 9,812,361, 2017 | 5 | 2017 |
