Ikuti
Paddy French
Paddy French
Email yang diverifikasi di tudelft.nl
Judul
Dikutip oleh
Dikutip oleh
Tahun
Surface micromachined tuneable interferometer array
K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ...
Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994
2991994
Piezoresistance in polysilicon and its applications to strain gauges
PJ French, AGR Evans
Solid-State Electronics 32 (1), 1-10, 1989
2391989
Polysilicon: a versatile material for microsystems
PJ French
Sensors and actuators A: Physical 99 (1-2), 3-12, 2002
2312002
Optimization of a low-stress silicon nitride process for surface-micromachining applications
PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel
Sensors and Actuators A: physical 58 (2), 149-157, 1997
2291997
Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures
M Bao, H Yang, Y Sun, PJ French
Journal of Micromechanics and Microengineering 13 (6), 795, 2003
2022003
Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability
H Sadeghian, CK Yang, JFL Goosen, E Van Der Drift, A Bossche, ...
Applied Physics Letters 94 (22), 2009
1752009
Comparison of techniques for measuring both compressive and tensile stress in thin films
BP Van Drieënhuizen, JFL Goosen, PJ French, RF Wolffenbuttel
Sensors and Actuators A: Physical 37, 756-765, 1993
1691993
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French
Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002
1592002
Polyimide sacrificial layer and novel materials for post-processing surface micromachining
A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro
Journal of Micromechanics and Microengineering 12 (4), 385, 2002
1382002
Sensors with digital or frequency output
S Middelhoek, PJ French, JH Huijsing, WJ Lian
Sensors and actuators 15 (2), 119-133, 1988
1311988
Polycrystalline silicon strain sensors
PJ French, AGR Evans
Sensors and actuators 8 (3), 219-225, 1985
1201985
Development of surface micromachining techniques compatible with on-chip electronics
PJ French
Journal of Micromechanics and Microengineering 6 (2), 197, 1996
1131996
Galvanic porous silicon formation without external contacts
CMA Ashruf, PJ French, P Bressers, JJ Kelly
Sensors and Actuators A: Physical 74 (1-3), 118-122, 1999
1121999
Galvanic cell formation in silicon/metal contacts: The effect on silicon surface morphology
XH Xia, CMA Ashruf, PJ French, JJ Kelly
Chemistry of materials 12 (6), 1671-1678, 2000
1062000
Fabrication of a CMOS compatible pressure sensor for harsh environments
LS Pakula, H Yang, HTM Pham, PJ French, PM Sarro
Journal of Micromechanics and Microengineering 14 (11), 1478, 2004
1012004
A porous SiC ammonia sensor
EJ Connolly, B Timmer, HTM Pham, J Groeneweg, PM Sarro, W Olthuis, ...
Sensors and Actuators B: Chemical 109 (1), 44-46, 2005
1002005
Effects of size and defects on the elasticity of silicon nanocantilevers
H Sadeghian, CK Yang, JFL Goosen, A Bossche, U Staufer, PJ French, ...
Journal of Micromechanics and Microengineering 20 (6), 064012, 2010
992010
The piezojunction effect in silicon sensors and circuits and its relation to piezoresistance
JF Creemer, F Fruett, GCM Meijer, PJ French
IEEE sensors journal 1 (2), 98, 2001
952001
Sensors for catheter applications
PJ French, D Tanase, JFL Goosen
Sensors Update 13 (1), 107-153, 2003
932003
Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon
K Aratani, PJ French, PM Sarro, RF Wolffenbuttel, S Middelhoek
[1993] Proceedings IEEE Micro Electro Mechanical Systems, 230-235, 1993
871993
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